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Re-imaging optical system employing refractive and diffractive o

Optical: systems and elements – Diffraction – From zone plate
Patent

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Reflective lithography mask inspection tool based on...

Optical: systems and elements – Diffraction – From zone plate
Reexamination Certificate

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Refractive-diffractive hybrid lens

Optical: systems and elements – Diffraction – From zone plate
Reexamination Certificate

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Reticle with phase-shifters and a method of fabricating the same

Optical: systems and elements – Diffraction – From zone plate
Patent

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