Optical: systems and elements – Diffraction – From zone plate
Patent
1989-12-27
1992-06-23
Arnold, Bruce Y.
Optical: systems and elements
Diffraction
From zone plate
359569, 359619, G02B 2744
Patent
active
051248433
ABSTRACT:
An optical element for converting a uniform beam of light of wavelength .lambda. into an array of illuminated spots, the optical element including a phase plate made of an array of constant phase zones; and an image plane disposed parallel to and at a preselected distance from the phase plate, the preselected distance being selected so that illuminating the phase plate with uniform coherent illumination of wavelength .lambda. produces the array of illuminated spots on the image plane, the spot array having a fill factor in at least one dimension that is less than 1/2.
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Packross, Bernd et al., "Image Synthesis Using Self Imaging", OPTICS COMMUNICATIONS, vol. 56, No. 6, Jan. 15, 1986, pp. 394-398.
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J. A. Thomas, Diplom Thesis, "Binary-Phase Elements In Photoresist", Mar. 1989, Chapters 5 and 6.
Leger James R.
Swanson Gary J.
Arnold Bruce Y.
Massachusetts Institute of Technology
Ryan J. P.
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