Single ended tuning fork inertial sensor and method
Single ended tuning fork internal sensor and method
Single plate capacitive acceleration derivative detector
Single proof mass, 3 axis MEMS transducer
Single transducer levitator
Single-axis centrifugal rate sensor
Single-side microelectromechanical capacitive accelerometer...
Single-side microelectromechanical capacitive acclerometer...
Six degree-of-freedom micro-machined multi-sensor
Six-legged type piezoelectric vibration gyroscope
Skewed axis inertial sensor assembly
Small angle bias measurement mechanism for MEMS instruments
Small size, high capacitance readout silicon based MEMS...
SOI-MEMS gyroscope having three-fold symmetry
Solid state vibrating gyro
Solid-state gyroscopes and planar three-axis inertial...
Solid-state inertial sensor on chip
Sonic vibrating bell gyro
Sound level meter
Speed and distance calculator for skis