Signal processing system for inertial sensor
Silicon accelerometer
Silicon accelerometer responsive to three orthogonal force compo
Silicon base plate with low parasitic electrical...
Silicon bulk micromachined, symmetric, degenerate vibratorygyros
Silicon dual inertial sensors
Silicon flexure suspension for single degree or freedom...
Silicon gyro with integrated driving and sensing structures
Silicon gyroscope and method of driving the same
Silicon integrated angular rate sensor
Silicon micro-machined accelerometer using integrated electrical
Silicon micromachine with sacrificial pedestal
Silicon micromachined accelerometer
Silicon micromachined accelerometer/seismometer and method...
Silicon micromachined motion sensor and method of making
Silicon micromechanical gyroscope
Single axis attitude sensor
Single axis crystal constrained temperature compensated digital
Single axis rate sensor noise reduction
Single chip tri-axis accelerometer