Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1988-08-31
1990-08-07
Chapman, John
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
73DIG1, G01P 1510
Patent
active
049457659
ABSTRACT:
An inertial guidance accelerometer is formed as an integrated, monolithic, structure. Silicon micro-machining techniques are used to combine mechanical and electrical components of the device in a single crystal silicon wafer. The proof mass, flexible hinge, and resonator are formed by etching portions of a substrate, while the electrical circuits are monolithically integrated into the substrate using standard circuit integration techniques. The accelerometer includes a feedback control circuit for the resonator, as well as a digital-to-analog converter, for providing digital output signals indicative of the acceleration force applied to the device.
REFERENCES:
patent: 4517841 (1985-05-01), Peters et al.
patent: 4553436 (1985-11-01), Hansson
patent: 4653326 (1987-03-01), Danel et al.
patent: 4658174 (1987-04-01), Albert
patent: 4670092 (1987-06-01), Montamedi
patent: 4679434 (1987-07-01), Stewart
patent: 4699006 (1987-10-01), Boxenhorn
patent: 4718275 (1988-01-01), Norling
patent: 4736629 (1988-04-01), Cole
patent: 4766768 (1988-08-01), Norling et al.
patent: 4805456 (1989-02-01), Howe et al.
Design News Feb. 1, 1988 Pgs. 68/69, "Tiny Accelerometer Weighs Just One Gram".
Chapman John
Kearfott Guidance & Navigation Corp.
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