Silicon bulk micromachined, symmetric, degenerate vibratorygyros

Details Silicon bulk micromachined, symmetric, degenerate vibratorygyros Silicon bulk micromachined, symmetric, degenerate vibratorygyros

1996-05-31

1999-04-13

Williams, Hezron

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

7350404, 7350412, 7351429, 7351432, 331158, G01C 1900, G01P 900, G01P 1514

Patent

active

058940901

ABSTRACT:
When embodied in a microgyroscope, the invention is comprised of a silicon, four-leaf clover structure with a post attached to the center. The whole structure is suspended by four silicon cantilevers or springs. The device is electrostatically actuated and capacitively detects Coriolis induced motions of the leaves of the leaf clover structure. In the case where the post is not symmetric with the plane of the clover leaves, the device can is usable as an accelerometer. If the post is provided in the shape of a dumb bell or an asymmetric post, the center of gravity is moved out of the plane of clover leaf structure and a hybrid device is provided. When the clover leaf structure is used without a center mass, it performs as a high Q resonator usable as a sensor of any physical phenomena which can be coupled to the resonant performance.

REFERENCES:
patent: 5001940 (1991-03-01), Ogawa
patent: 5134881 (1992-08-01), Henrion et al.
patent: 5203208 (1993-04-01), Bernstein
patent: 5313835 (1994-05-01), Dunn
patent: 5377544 (1995-01-01), Dunn
patent: 5511419 (1996-04-01), Dunn

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