Silicon accelerometer responsive to three orthogonal force compo

Details Silicon accelerometer responsive to three orthogonal force compo Silicon accelerometer responsive to three orthogonal force compo

1989-04-06

1990-11-13

Chapman, John

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

338 5, 338 46, G01P 1512

Patent

active

049693590

ABSTRACT:
An accelerometer fabricated from silicon which is responsive to the three orthogonal components of an applied force. A method is also disclosed for etching the accelerometer from a single silicon substrate. Three rectangular beams or cantilevers are formed each having vertical sidewalls lying in crystalline planes orthogonal to one another. Each of the beams is directly responsive to one of the three orthogonal force components.

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"Tuning Forks in Silicon", by Rudolf A. Buser, Nico F. de Rooij; pp. 94 & 95 of IEEE Catalog Number 89TH0249-3, Micro Electro Mechanical Systems, dated Feb. 20-22, 1989.
"Realization of a Mesa Array in (001) Oriented Silicon Wafers for Tactile Sensing Applications", by R. Buser, B. Stauffer, N. F. DeRooij; pp. 879 & 800 of Extended Abstracts of the Electrochemical Society, vol. 86-2, dated Oct. 19-24, 1986.

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