Micro-machined vibrating structure and associated...
Micro-machining
Micro-mechanical rate-of-rotation sensor with coupled structure
Microelectromechanical dual-mass resonator structure
Microelectromechanical gyroscope with open loop reading...
Microelectromechanical gyroscope with self-test function and...
Microelectromechanical sensor with improved mechanical...
Microelectromechanical system for measuring angular rate
Microfabricated tuning fork gyroscope and associated...
Microgyro tuning using focused ion beams
Microgyrometer
Microgyroscope having asymmetric comb sensors
Microgyroscope having inner and outer mass parts
Microgyroscope tunable for translational acceleration
Microgyroscope with closed loop output
Microgyroscope with integrated vibratory element
Microgyroscope with integrated vibratory element
Microgyroscope with two resonant plates
Microgyroscope with vibratory structure having a multitude of gr
Micromachined acceleration and coriolis sensor