Microgyrometer

Details Microgyrometer Microgyrometer

1995-10-16

1997-03-11

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

7350402, G01P 904

Patent

active

056103344

ABSTRACT:
A microgyrometer for detecting a rotation about a first direction comprises a plate that is orthogonal to the first direction, suspended to a fixed frame and excited at its resonance frequency along a second direction perpendicular to the first direction. A rotation about the first direction causes the plate to vibrate about a third direction orthogonal to the first two directions. The plate comprises teeth extending respectively along the second and third directions and engaging, without contact, in grooves integral with the frame. Each tooth carries lateral metallizations which constitute capacitors with facing metallizations of the grooves.

REFERENCES:
patent: 5349855 (1994-09-01), Bernstein et al.
patent: 5359863 (1994-11-01), Dunn
patent: 5377544 (1995-01-01), Dunn

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