Monolithic micromechanical apparatus with suspended...
Monolithic micromechanical vibrating beam accelerometer with tri
Monolithic miniature accelerometer
Monolithic piezoelectric accelerometer
Monolithic resonator for vibrating beam force sensors
Monolithic silicon acceleration sensor
Motion detector according to the Ferraris principle
Motion restraints for micromechanical devices
Motion sensors
Movable element with position sensing means for transducers
Movement sensing
Multi-axis accelerometer comprising a mass suspended by...
Multi-axis sensor
Multi-dimensional and acceleration detector
Multi-functional micro electromechanical silicon carbide...
Multi-mode accelerometer
Multi-purpose impact sensor
Multiaxial micromachined differential accelerometer
Multicomponent acceleration sensor
Multidirectional force-sensing transducer