Monolithic resonator for vibrating beam force sensors

Details Monolithic resonator for vibrating beam force sensors Monolithic resonator for vibrating beam force sensors

1994-09-29

1997-01-21

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73DIG1, 310321, 310323, G01P 1509

Patent

active

055961452

ABSTRACT:
A monolithic resonator for a vibrating beam device, either an accelerometer or a pressure transducer, includes an outer structure and an inner structure. The outer structure includes a mounting structure, a proof mass or pressure transfer structure and a plurality of flexure beams parallel for the accelerometer and perpendicular for the pressure transducer, extending between the mounting and either proof mass or pressure transfer structure. The inner structure is connected to the outer structure and contains isolator masses, isolator beams and a vibrating beam. The outer structure has a thickness greater than the intermediate thickness of the isolator masses which is in turn thicker than the inner structure thickness of the isolator beams and vibrating beam. The intermediate thickness is independently selected to achieve the ideal mass requirements of the vibration isolation mechanism.

REFERENCES:
patent: 4710668 (1987-12-01), Fima et al.
patent: 4743790 (1988-05-01), Albert
patent: 4804875 (1989-02-01), Albert
patent: 4891984 (1990-01-01), Fujii et al.
patent: 4980598 (1990-12-01), Albert
patent: 5109175 (1992-04-01), Albert

Affiliated with

Also associated with

Rating

Monolithic resonator for vibrating beam force sensors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Monolithic resonator for vibrating beam force sensors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Monolithic resonator for vibrating beam force sensors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2325610