Multiaxial micromachined differential accelerometer

Details Multiaxial micromachined differential accelerometer Multiaxial micromachined differential accelerometer

2006-09-12

2006-09-12

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514380, C073S514290

Reexamination Certificate

active

07104128

ABSTRACT:
The invention relates to a differential accelerometer micromachined in a plane plate, comprising a base and a differential measurement cell which includes a moveable seismic mass and two force sensors that are connected to the mass and to the base. Under the effect of an acceleration along Ox and/or Oy, Ox and Oy being directions orthogonal to the plane of the plate, the seismic mass is capable of undergoing linear displacement along a direction parallel to the acceleration, and has a center of gravity located at the intersection of a plane A1perpendicular to the plane of the plate and passing through Ox and of a plane A2perpendicular to the plane of the plate and passing through Oy; a first force sensor comprises, along Ox, two identical detection systems for a differential measurement of the linear displacement along Ox, and associated with each detection system a filtering system connected to the base, and a second force sensor comprises, along Oy, two other identical detection systems for the differential measurement of the linear displacement along Oy, and associated with each detection system a filtering system connected to the base, each filtering system allowing the associated detection system to move along a direction perpendicular to that of its detection without permitting it to move along its detection direction.

REFERENCES:
patent: 5706252 (1998-01-01), Le Verrier
patent: 6647759 (2003-11-01), Leverrier
patent: 2005/0183503 (2005-08-01), Malametz
patent: 2000 081338 (2000-09-01), None

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