Monolithic piezoelectric accelerometer

Details Monolithic piezoelectric accelerometer Monolithic piezoelectric accelerometer

1996-11-27

1999-02-09

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

310329, G01P 1509

Patent

active

058697624

ABSTRACT:
A monolithic piezoelectric accelerometer of the longitudinal type having a ass element, a piezoelectric accelerometer sensor element and electrodes interconnecting the mass and sensor elements, in which the mass and sensor elements are formed as a monolithic structure. Included is the method for making the monolithic piezoelectric accelerometer.

REFERENCES:
patent: 4197478 (1980-04-01), Silvus
patent: 4378510 (1983-03-01), Bennett
patent: 5661361 (1997-08-01), Lysen

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