Multidirectional force-sensing transducer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

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338 5, G01P 508

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active

048095524

ABSTRACT:
A multidirectional force-sensing transducer useful in automotive systems which require acceleration/deceleration detection. The transducer, in a preferred form, includes a unitary structure consisting essentially of silicon, and a substantially planar T-shaped force-sensing body integral with the unitary structure. The T-shaped force sensing body is comprised of base and cantilever beams defined in the unitary structure--the base and cantilever beams being strained principally in response to first and second forces acting upon the body in directions substantially within, and orthogonal to, the body's plane, respectively. Sensors (preferably thin film piezoresistors) operatively associated with the base and cantilever beams sense the strain of the base and/or cantilever beams and thus respectively detect the multidirectional forces acting upon the force-sensing body.

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K. W. Lee and B. E. Walker, "Silicon Micromachining Technology for Automotive Applications", SAE Pub. No. SP655, Feb. 1986, pp. 1-10.

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