Motion restraints for micromechanical devices

Details Motion restraints for micromechanical devices Motion restraints for micromechanical devices

1990-07-30

1992-05-12

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73505, 7386262, G01P 1502

Patent

active

051116936

ABSTRACT:
Motion restraints and a method for their fabrication are provided for use with a micromechanical transducer, such as a gyroscope or an accelerometer, to limit the motion of resiliently supported transducer elements, preventing extreme lateral or rotational displacement of the elements. The motion restraints are fabricated of a material such as gold that prevents or reduces the sticking of the transducer elements at points of contact between them. In one embodiment, the motion restraints include cantilevered depositions that extend from the substrate over the transducer element. In a further embodiment, the restraints includes a metal capped post and close-tolerance lateral restraints.

REFERENCES:
patent: 3370458 (1968-02-01), Dillon
patent: 4882933 (1989-11-01), Petersen et al.
Kurt E. Petersen, "Silicon as a Mechanical Material", Proceedings of the IEEE, vol. 70, No. 5, May 1982, pp. 420-457.
M. Nakamura et al., "Novel Electromechanical Micro-Machining and its Application for Semiconductor Acceleration Sensor IC," Digent of Technical Papers (1987), Institute of Electrical Engineers of Japan, pp. 112-115.
L. M. Moskalik, "Tensometric Accelerometers with Overload Protection," Meas. Tech, vol. 22, No. 12, (Dec. 1979), pp. 1469-71.

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