Micromechanical sensor with a guard band electrode and fabricati
Micromechanical spin angular acceleration sensor
Micromechanical structure, in particular for an acceleration...
Microsensor with a resonator structure
Microstructure with movable mass
Microsystem with integrated circuit and micromechanical componen
Microwave acceleration transducer
Microwave resonator accelerometer
Microwave vector displacement and acceleration transducer
Miniature silicon accelerometer and method
Miniaturized accelerometer of the type using spring compensation
Mobile plate accelerometer with electrostatic feedback motor
Monocrystalline accelerometer and angular rate sensor and method
Monolithic accelerometer
Monolithic accelerometer
Monolithic accelerometer with flexurally mounted force transduce
Monolithic accelerometric transducer
Monolithic chip containing integrated circuitry and suspended mi
Monolithic micromechanical apparatus with suspended microstructu
Monolithic micromechanical apparatus with suspended microstructu