Miniaturized accelerometer of the type using spring compensation

Details Miniaturized accelerometer of the type using spring compensation Miniaturized accelerometer of the type using spring compensation

1998-06-02

2000-02-29

Moller, Richard A.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351432, G01P 1500

Patent

active

060295171

ABSTRACT:
The invention relates to a miniaturized accelerometer of the type with spring compensation of the gravity effect. The accelerometer seismic mass (1), its support and the compensating spring (2) are produced in the same substrate (10), regulating means being provided for placing the spring under mechanical tension.

REFERENCES:
patent: 2638578 (1953-05-01), Piety
patent: 5495761 (1996-03-01), Diem et al.
patent: 5511421 (1996-04-01), Kudo

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