Monolithic chip containing integrated circuitry and suspended mi

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

73517B, G01P 15125, G01P 1513

Patent

active

054171113

ABSTRACT:
The invention is a monolithic sensor comprising a silicon substrate, a suspended polysilicon microstructure for sensing a condition disposed above and suspended from the substrate, and circuitry for resolving a signal based on said sensed condition, the circuitry including bipolar circuit elements and MOS circuit elements. One disclosed embodiment is particularly adapted for sensing acceleration by means of a differential capacitor arrangement in which one capacitor plate in the arrangement is moveable responsive to an acceleration.

REFERENCES:
patent: 4029346 (1977-06-01), Fernald, Sr.
patent: 4050049 (1977-09-01), Youmans
patent: 4071838 (1978-01-01), Block
patent: 4244225 (1981-01-01), Greenwood
patent: 4342227 (1982-08-01), Peterson et al.
patent: 4356730 (1982-11-01), Cade
patent: 4378510 (1983-03-01), Bennett
patent: 4430895 (1984-02-01), Colton
patent: 4435737 (1984-03-01), Colton
patent: 4483194 (1984-11-01), Rudolf
patent: 4488445 (1984-12-01), Aske
patent: 4522072 (1985-06-01), Sulouff et al.
patent: 4553436 (1985-11-01), Hansson
patent: 4600934 (1986-07-01), Ain et al.
patent: 4641539 (1987-02-01), Vilimek
patent: 4653326 (1987-03-01), Danel et al.
patent: 4656750 (1987-04-01), Pitt et al.
patent: 4660418 (1987-04-01), Greenwood et al.
patent: 4663972 (1987-05-01), Cerard
patent: 4670092 (1987-06-01), Motamedi
patent: 4674319 (1987-06-01), Muller et al.
patent: 4679434 (1987-07-01), Stewart
patent: 4691568 (1987-09-01), Rendek
patent: 4705659 (1987-11-01), Bernstein et al.
patent: 4711128 (1987-12-01), Boura
patent: 4736629 (1988-04-01), Cole
patent: 4750364 (1988-06-01), Kawamura et al.
patent: 4766768 (1988-08-01), Norling
patent: 4772928 (1988-09-01), Dietrich et al.
patent: 4776924 (1988-10-01), Delapierre
patent: 4779463 (1988-10-01), Woodruff
patent: 4804875 (1989-02-01), Albert
patent: 4809552 (1989-03-01), Johnson
patent: 4829822 (1989-05-01), Imai et al.
patent: 4836025 (1989-06-01), Mihara
patent: 4848157 (1989-07-01), Kobayashi
patent: 4851080 (1989-07-01), Howe et al.
patent: 4869107 (1989-09-01), Murakami
patent: 4873868 (1989-10-01), Pierre et al.
patent: 4874499 (1989-10-01), Smith et al.
patent: 4879914 (1989-11-01), Norling
patent: 4882993 (1989-11-01), Petersen et al.
patent: 4884446 (1989-12-01), Ljung
patent: 4891255 (1990-01-01), Ciarlo
patent: 4891984 (1990-01-01), Fujii et al.
patent: 4891985 (1990-01-01), Glenn
patent: 4893509 (1990-01-01), MacIver et al.
patent: 4896098 (1990-01-01), Haritonidis et al.
patent: 4901570 (1990-02-01), Chang et al.
patent: 4901586 (1990-02-01), Blake et al.
patent: 4908509 (1990-03-01), Senturia
patent: 4912990 (1990-04-01), Norling
patent: 4918032 (1990-04-01), Jain et al.
patent: 4920800 (1990-05-01), Boura
patent: 4920801 (1990-05-01), Church
patent: 4922756 (1990-08-01), Henrion
patent: 4926689 (1990-05-01), Hanson
patent: 4926696 (1990-05-01), Haritonidis
patent: 4928203 (1990-05-01), Swindal et al.
patent: 4930042 (1990-05-01), Wiegand et al.
patent: 4930043 (1990-05-01), Wiegand
patent: 4930351 (1990-06-01), Macy et al.
patent: 4934750 (1990-07-01), Howe et al.
patent: 4939935 (1990-07-01), Amand
patent: 4942767 (1990-07-01), Haritonidis et al.
patent: 4943750 (1990-07-01), Howe et al.
patent: 4945733 (1990-08-01), LaBrecque
patent: 4945765 (1990-08-01), Roszhart
patent: 4951510 (1990-08-01), Holm-Kennedy et al.
patent: 4967598 (1990-11-01), Wakatsuki et al.
patent: 4967605 (1990-11-01), Okada
patent: 4969359 (1990-11-01), Mikkor
patent: 4977101 (1990-12-01), Yoder et al.
patent: 4980598 (1990-12-01), Albert
patent: 4987781 (1991-01-01), Reiman
patent: 4995233 (1991-02-01), Luloff
patent: 4997521 (1991-03-01), Howe et al.
patent: 5000817 (1991-03-01), Aine
patent: 5005413 (1991-04-01), Novack et al.
patent: 5006487 (1991-04-01), Stokes
patent: 5008774 (1991-04-01), Bullis et al.
patent: 5016072 (1991-05-01), Greiff
patent: 5025346 (1991-06-01), Tang et al.
patent: 5054320 (1991-10-01), Yvon
patent: 5059556 (1991-11-01), Wilcoxen
patent: 5060039 (1991-10-01), Weinberg et al.
patent: 5060526 (1991-10-01), Barth et al.
Payne, R. S. and Dinsmore, K. A., Surface Micromachined Accelerometer: A Technology Update, SAE International, International Congress Exposition, Detroit, Michigan, Feb. 25-Mar. 1, 1991, pp. 127-135.
T. W. Kenny, S. B. Waltman, J. K. Reynolds and W. J. Kaiser, Micromachined Silicon Tunnel Sensor for Motion Detection, Appl. Phys. Lett. 58(1), 7 Jan. 1991.
Greenwood, John, "Silicon Based Sensors: Technology Overview", Instrument Science and Technology Group of the Institute of Physics London, Dec. 8, 1986.
Sensors and Actuators, vol. 17, Nos. 3&4, (1989) Mark Van Paemel, pp. 629-637, "Interface Circuit for Capacitive Accelorometer."
Silicon Micromechanics: Sensors And Actuators On A Chip, IEEE Spectrum, Jul. 1990, pp. 29-31.
Improved IC-Compatible Piezoelectric Microphone and CMOS Process/ E. S. Kim, J. R. Kim and R. S. Muller,IEEE May 1991, pp. 270-273.
A Bipolar Integrated Silicon Pressure Sensor M. K. Lee, B. N. Lee and S. M. Jung, IEEE May 1991, pp. 300-303.
Process Integration for Active Polysilicon Resonant Microstructures M. W. Putty, et al. Sensors and Actuators, 20(1989) pp. 143-151.
Carbon Film Oxidation-Undercut Kinetics J. Electrochem. Soc. Solid-State Science and Technology, Aug. 1988, pp. 2086-2090.
The Application of Fine-grained, Tensile Polysilicon to Mechanically Resonant Transducers, H. Guckel et al. Sensors and Actuators, A21-A23(1990), pp. 346-351.
Integrated Silicon Electromechanical Vapor Sensor, R. T. Howe, U-M-I Dissertation Information Service, 1987.
Integrated Micromachined Silicon: Vehicle Sensors of the 1990's, R. P. Knockeart and R. E. Suclouff, IEEE Proceedings on The Inter. Cong. on Trans. Electronics, pp. 203-212, Oct. 1989.
Microsensors Enhance Process Variable Transmitters' Abilities, H. M. Morris, Control Engineering vol. 38 No. 13, Oct. 1991, pp. 122-125.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Monolithic chip containing integrated circuitry and suspended mi does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Monolithic chip containing integrated circuitry and suspended mi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Monolithic chip containing integrated circuitry and suspended mi will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2133564

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.