Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1993-06-10
1995-05-23
Chapman, John E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
73517B, G01P 15125, G01P 1513
Patent
active
054171113
ABSTRACT:
The invention is a monolithic sensor comprising a silicon substrate, a suspended polysilicon microstructure for sensing a condition disposed above and suspended from the substrate, and circuitry for resolving a signal based on said sensed condition, the circuitry including bipolar circuit elements and MOS circuit elements. One disclosed embodiment is particularly adapted for sensing acceleration by means of a differential capacitor arrangement in which one capacitor plate in the arrangement is moveable responsive to an acceleration.
REFERENCES:
patent: 4029346 (1977-06-01), Fernald, Sr.
patent: 4050049 (1977-09-01), Youmans
patent: 4071838 (1978-01-01), Block
patent: 4244225 (1981-01-01), Greenwood
patent: 4342227 (1982-08-01), Peterson et al.
patent: 4356730 (1982-11-01), Cade
patent: 4378510 (1983-03-01), Bennett
patent: 4430895 (1984-02-01), Colton
patent: 4435737 (1984-03-01), Colton
patent: 4483194 (1984-11-01), Rudolf
patent: 4488445 (1984-12-01), Aske
patent: 4522072 (1985-06-01), Sulouff et al.
patent: 4553436 (1985-11-01), Hansson
patent: 4600934 (1986-07-01), Ain et al.
patent: 4641539 (1987-02-01), Vilimek
patent: 4653326 (1987-03-01), Danel et al.
patent: 4656750 (1987-04-01), Pitt et al.
patent: 4660418 (1987-04-01), Greenwood et al.
patent: 4663972 (1987-05-01), Cerard
patent: 4670092 (1987-06-01), Motamedi
patent: 4674319 (1987-06-01), Muller et al.
patent: 4679434 (1987-07-01), Stewart
patent: 4691568 (1987-09-01), Rendek
patent: 4705659 (1987-11-01), Bernstein et al.
patent: 4711128 (1987-12-01), Boura
patent: 4736629 (1988-04-01), Cole
patent: 4750364 (1988-06-01), Kawamura et al.
patent: 4766768 (1988-08-01), Norling
patent: 4772928 (1988-09-01), Dietrich et al.
patent: 4776924 (1988-10-01), Delapierre
patent: 4779463 (1988-10-01), Woodruff
patent: 4804875 (1989-02-01), Albert
patent: 4809552 (1989-03-01), Johnson
patent: 4829822 (1989-05-01), Imai et al.
patent: 4836025 (1989-06-01), Mihara
patent: 4848157 (1989-07-01), Kobayashi
patent: 4851080 (1989-07-01), Howe et al.
patent: 4869107 (1989-09-01), Murakami
patent: 4873868 (1989-10-01), Pierre et al.
patent: 4874499 (1989-10-01), Smith et al.
patent: 4879914 (1989-11-01), Norling
patent: 4882993 (1989-11-01), Petersen et al.
patent: 4884446 (1989-12-01), Ljung
patent: 4891255 (1990-01-01), Ciarlo
patent: 4891984 (1990-01-01), Fujii et al.
patent: 4891985 (1990-01-01), Glenn
patent: 4893509 (1990-01-01), MacIver et al.
patent: 4896098 (1990-01-01), Haritonidis et al.
patent: 4901570 (1990-02-01), Chang et al.
patent: 4901586 (1990-02-01), Blake et al.
patent: 4908509 (1990-03-01), Senturia
patent: 4912990 (1990-04-01), Norling
patent: 4918032 (1990-04-01), Jain et al.
patent: 4920800 (1990-05-01), Boura
patent: 4920801 (1990-05-01), Church
patent: 4922756 (1990-08-01), Henrion
patent: 4926689 (1990-05-01), Hanson
patent: 4926696 (1990-05-01), Haritonidis
patent: 4928203 (1990-05-01), Swindal et al.
patent: 4930042 (1990-05-01), Wiegand et al.
patent: 4930043 (1990-05-01), Wiegand
patent: 4930351 (1990-06-01), Macy et al.
patent: 4934750 (1990-07-01), Howe et al.
patent: 4939935 (1990-07-01), Amand
patent: 4942767 (1990-07-01), Haritonidis et al.
patent: 4943750 (1990-07-01), Howe et al.
patent: 4945733 (1990-08-01), LaBrecque
patent: 4945765 (1990-08-01), Roszhart
patent: 4951510 (1990-08-01), Holm-Kennedy et al.
patent: 4967598 (1990-11-01), Wakatsuki et al.
patent: 4967605 (1990-11-01), Okada
patent: 4969359 (1990-11-01), Mikkor
patent: 4977101 (1990-12-01), Yoder et al.
patent: 4980598 (1990-12-01), Albert
patent: 4987781 (1991-01-01), Reiman
patent: 4995233 (1991-02-01), Luloff
patent: 4997521 (1991-03-01), Howe et al.
patent: 5000817 (1991-03-01), Aine
patent: 5005413 (1991-04-01), Novack et al.
patent: 5006487 (1991-04-01), Stokes
patent: 5008774 (1991-04-01), Bullis et al.
patent: 5016072 (1991-05-01), Greiff
patent: 5025346 (1991-06-01), Tang et al.
patent: 5054320 (1991-10-01), Yvon
patent: 5059556 (1991-11-01), Wilcoxen
patent: 5060039 (1991-10-01), Weinberg et al.
patent: 5060526 (1991-10-01), Barth et al.
Payne, R. S. and Dinsmore, K. A., Surface Micromachined Accelerometer: A Technology Update, SAE International, International Congress Exposition, Detroit, Michigan, Feb. 25-Mar. 1, 1991, pp. 127-135.
T. W. Kenny, S. B. Waltman, J. K. Reynolds and W. J. Kaiser, Micromachined Silicon Tunnel Sensor for Motion Detection, Appl. Phys. Lett. 58(1), 7 Jan. 1991.
Greenwood, John, "Silicon Based Sensors: Technology Overview", Instrument Science and Technology Group of the Institute of Physics London, Dec. 8, 1986.
Sensors and Actuators, vol. 17, Nos. 3&4, (1989) Mark Van Paemel, pp. 629-637, "Interface Circuit for Capacitive Accelorometer."
Silicon Micromechanics: Sensors And Actuators On A Chip, IEEE Spectrum, Jul. 1990, pp. 29-31.
Improved IC-Compatible Piezoelectric Microphone and CMOS Process/ E. S. Kim, J. R. Kim and R. S. Muller,IEEE May 1991, pp. 270-273.
A Bipolar Integrated Silicon Pressure Sensor M. K. Lee, B. N. Lee and S. M. Jung, IEEE May 1991, pp. 300-303.
Process Integration for Active Polysilicon Resonant Microstructures M. W. Putty, et al. Sensors and Actuators, 20(1989) pp. 143-151.
Carbon Film Oxidation-Undercut Kinetics J. Electrochem. Soc. Solid-State Science and Technology, Aug. 1988, pp. 2086-2090.
The Application of Fine-grained, Tensile Polysilicon to Mechanically Resonant Transducers, H. Guckel et al. Sensors and Actuators, A21-A23(1990), pp. 346-351.
Integrated Silicon Electromechanical Vapor Sensor, R. T. Howe, U-M-I Dissertation Information Service, 1987.
Integrated Micromachined Silicon: Vehicle Sensors of the 1990's, R. P. Knockeart and R. E. Suclouff, IEEE Proceedings on The Inter. Cong. on Trans. Electronics, pp. 203-212, Oct. 1989.
Microsensors Enhance Process Variable Transmitters' Abilities, H. M. Morris, Control Engineering vol. 38 No. 13, Oct. 1991, pp. 122-125.
Brokaw A. Paul
Core Theresa A.
Sherman Steven J.
Tsang Robert W. K.
Analog Devices Inc.
Chapman John E.
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