Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2005-08-23
2005-08-23
Chapman, John E. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
C073S514380
Reexamination Certificate
active
06931928
ABSTRACT:
A microstructure includes a mass; a base member in which the mass is movably contained. The mass includes a surface, which is exposed out of the base member, and a stopper wire, which is arranged above the surface of the mass so as to inhibit over move of the mass.
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patent: 4129042 (1978-12-01), Rosvold
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patent: 1-163620 (1989-06-01), None
Harada Muneo
Hashimoto Hiroyuki
Ikeuchi Naoki
Ooasa Takahiko
Chapman John E.
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Tokyo Electron Limited
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