Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1995-06-02
1998-03-03
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
7351401, 73862381, 437921, G01P 1500, G01L 100
Patent
active
057237905
ABSTRACT:
A semiconductor device for measuring force components, acceleration, and/or angular rate, formed from a single crystal (monocrystalline semiconductor substrate) comprises at least one cantilever beam inclined to the main surface of the monocrystalline material of the monocrystalline semiconductor substrate. At least one interial mass may be coupled to a corresponding at least one cantilever beam and be integrally formed from the monocrystalline semiconductor substrate. The angle of the cantilever beam to the main surface of the monocrystalline material of the monocrystalline semiconductor substrate is achieved through etching of the monocrystalline semiconductor substrate and is defined by the inclination of crystal planes constituting the beam. The bending of the inclined cantilever beam principally occurs in a direction toward the beam.
REFERENCES:
patent: 4590801 (1986-05-01), Merhav
patent: 4750364 (1988-06-01), Kawamura et al.
patent: 4891984 (1990-01-01), Fujii et al.
patent: 4920801 (1990-05-01), Church
patent: 4969359 (1990-11-01), Mikkor
patent: 5083466 (1992-01-01), Holm-Kennedy et al.
patent: 5095762 (1992-03-01), Holm-Kennedy et al.
patent: 5239870 (1993-08-01), Kaneko
patent: 5383363 (1995-01-01), Kulmaczewski
patent: 5425750 (1995-06-01), Moberg
Padgaonkar, A.J.; Krieger, K.W.; King A. I., "Measurement of Angular Acceleration of a Rigid Body Using Linear Accelerometers," Journal of Applied Mechanics Sep. 1975, pp. 552-556.
Lasky, J.B., "Wafer bonding for Silicon-on-Insulator Technologies", Applied Physics Letters 48 (1) Jan. 6, 1986, pp. 78-80.
Barnaby, Roland E.; Chatterton, John B.: Gerring Fred H., "Gyrotron Angular Rate Tachometer", Aeronautical Engineering Review, Nov. 1953, pp. 31-36.
Moller Richard A.
Williams Hezron E.
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