Miniature silicon accelerometer and method

Details Miniature silicon accelerometer and method Miniature silicon accelerometer and method

1991-01-11

1993-04-27

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73517R, G01P 1513, G01P 15125

Patent

active

052051714

ABSTRACT:
A miniature accelerometer is fabricated using integrated circuit manufacturing and silicon micromachining techniques to form a closed loop, force balance sensor utilizing a silicon proofmass formed from and connected to a layer of silicon by a split flexure etched therein. The sensor circuitry detects AC signals coupled from the proofmass to a pair of electrodes formed on glass surfaces anodically bonded to the silicon layer. A DC restorative force is applied to the electrodes in response to the detected AC signals to balance acceleration forces applied to the proofmass. The sensor design is highly symmetrical.

REFERENCES:
patent: 3062059 (1962-11-01), Singleton
patent: 4102202 (1978-07-01), Feriss
patent: 4336718 (1982-06-01), Washburn
patent: 4483194 (1984-11-01), Rudolf
patent: 4584885 (1986-04-01), Codwell
patent: 4679434 (1987-07-01), Stewart
patent: 5006487 (1991-04-01), Stokes
patent: 5008774 (1991-03-01), Bollis et al.

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