Micro-electro-mechanical systems ultra-sensitive...
Micro-electromechanical structure with improved...
Micro-machined accelerometer
Micro-machined accelerometer
Micro-machined accelerometer array with shield plane
Micro-machined accelerometer with composite material springs
Micro-machined accelerometer with tilt compensation
Micro-machined mechanical structure and device incorporating...
Micro-machined suspension plate with integral proof mass for...
Micro-mechanical inertial sensors
Micro-mechanical semiconductor accelerometer
Micro-miniature accelerometer
Microaccelerometer employing resonant circuit detection of seism
Microaccelerometer having low stress bonds and means for prevent
Microaccelerometer with temperature-compensated resonators
Microelectromechanical accelerometer with...
Microelectromechanical capacitive accelerometer and method of ma
Microelectromechanical lateral accelerometer
Microelectromechanical lateral accelerometer
Microelectromechanical structure insensitive to mechanical...