Microsystem with a flexible membrane pressure sensor
Microvacuum sensor having an expanded sensitivity range
Miniature electronic pressure gauge
Miniature fiber optic pressure sensor
Miniature gauge pressure sensor using silicon fusion bonding and
Miniature gauge pressure sensor using silicon fusion bonding...
Miniature hydrostat fabricated using multiple microelectromechan
Miniature optically coupled electrically isolated...
Miniature optically coupled electrically isolated...
Miniature pressure sensor and pressure sensor arrays
Miniature pressure sensor and pressure sensor arrays
Miniature pressure transducer
Miniature silicon based thermal vacuum sensor and method of meas
Miniaturized membrane and shell for a pressure measuring sensor
Miniaturized membrane and shell for a pressure measuring sensor
Miniaturized pressure sensor
Miniaturized pressure sensor
Modified dual diaphragm pressure sensor
Modified dual diaphragm pressure sensor
Modular diaphragm pressure sensor with peripheral mounted electr