Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1993-08-05
1995-08-08
Chilcot, Jr., Richard E.
Measuring and testing
Fluid pressure gauge
Diaphragm
73727, 73721, G01L 904
Patent
active
054388767
ABSTRACT:
A modular pressure sensor has a pressure-sensing element, electrical terminals, interconnections, and a support substrate. The pressure-sensing element produces an electrical signal indicative of pressure at local contacts and the interconnections apply the signal to the electrical terminals. The electrical terminals are secured to the substrate and extend along a peripheral surface of the substrate. The modular pressure sensor can mount, with different orientations, to a header to form a pressure transducer.
REFERENCES:
patent: 3800264 (1974-03-01), Kurtz et al.
patent: 4276533 (1981-06-01), Tominaga et al.
patent: 4322980 (1982-04-01), Suzuki et al.
patent: 4399707 (1983-08-01), Wamstad
patent: 4691575 (1987-09-01), Sonderegger
patent: 4763098 (1988-08-01), Glenn et al.
"Ceramic Packaging, Early Ceramic Packaging", Microelectronics Packaging Handbook, Van Nostrand Reinhold, New York, pp. 460-463 and cover pages.
Chilcot Jr. Richard E.
Felber Joseph L.
The Foxboro Company
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