Modular diaphragm pressure sensor with peripheral mounted electr

Measuring and testing – Fluid pressure gauge – Diaphragm

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73727, 73721, G01L 904

Patent

active

054388767

ABSTRACT:
A modular pressure sensor has a pressure-sensing element, electrical terminals, interconnections, and a support substrate. The pressure-sensing element produces an electrical signal indicative of pressure at local contacts and the interconnections apply the signal to the electrical terminals. The electrical terminals are secured to the substrate and extend along a peripheral surface of the substrate. The modular pressure sensor can mount, with different orientations, to a header to form a pressure transducer.

REFERENCES:
patent: 3800264 (1974-03-01), Kurtz et al.
patent: 4276533 (1981-06-01), Tominaga et al.
patent: 4322980 (1982-04-01), Suzuki et al.
patent: 4399707 (1983-08-01), Wamstad
patent: 4691575 (1987-09-01), Sonderegger
patent: 4763098 (1988-08-01), Glenn et al.
"Ceramic Packaging, Early Ceramic Packaging", Microelectronics Packaging Handbook, Van Nostrand Reinhold, New York, pp. 460-463 and cover pages.

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