Modified dual diaphragm pressure sensor

Details Modified dual diaphragm pressure sensor Modified dual diaphragm pressure sensor

2005-05-03

2005-05-03

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

06886410

ABSTRACT:
A device for sensing pressure including a chamber defining part having a first diaphragm mounted in communication with the sealed chamber defining part, and a second diaphragm electrically insulated from the first, preferably by a spacer. The diaphragms are flexible and have a conductive surface. A sensor chamber is mounted on the other side of the second diaphragm. It has an opening in communication with a sensing atmosphere. One of the diaphragms includes openings it its surface to permit fluid to flow through the openings and the other diaphragm is solid and responds to change in pressure in the sensor chamber to move away from or toward the one diaphragm. Electrical connections measure the capacitance between the diaphragms as a function of the pressure in the sensor chamber.

REFERENCES:
patent: 4336567 (1982-06-01), Anastasia
patent: 4598576 (1986-07-01), Goldsmith et al.
patent: 4926874 (1990-05-01), Lee
patent: 5699041 (1997-12-01), Ballyns

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