Miniaturized pressure sensor

Details Miniaturized pressure sensor Miniaturized pressure sensor

2006-03-28

2006-03-28

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

07017420

ABSTRACT:
An entirely surface micromachined free hanging strain-gauge pressure sensor is disclosed. The sensing element consists of a 80 μm long H-shaped double ended supported force transducing beam (16). The beam is located beneath and at one end attached to a square polysilicon diaphragm (14) and at the other end to the cavity edge. The sensor according to the invention enables a combination of high pressure sensitivity and miniature chip size as well as good environmental isolation. The pressure sensitivity for the sensor with a H-shaped force transducing beam, 0.4 μm thick was found to be 5 μV/V/mmHg.

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patent: 0 531 696 (1993-03-01), None
patent: 0 649 009 (1995-04-01), None
patent: WO 00/39550 (2000-07-01), None

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