Mechanical-electrical transducer

Media compatible microsensor structure and methods of manufactur

Media compatible pressure sensor device utilizing self-aligned c

Media compatible pressure transducer

Media independent differential pressure transducer

Media isolated absolute pressure sensor

Membrane for capacitive vacuum measuring cell

Membrane pressure sensor comprising silicon carbide and...

Membrane unit, housing of a pressure measuring unit and...

Membrane unit, housing of a pressure measuring unit and...

Membrane-enclosed sensor, flow control element and analytic meth

MEMS fluidic actuator

MEMS pressure sensing device

MEMS pressure sensing device

MEMS pressure sensing device

MEMS pressure sensor and housing therefor

Method and apparatus for diagnosis of liquid losses in...

Method and apparatus for electronic compensation of erroneous re

Method and apparatus for feedback-control of an asymmetric diffe

Method and apparatus for forming a reference pressure within...