MEMS pressure sensing device

Details MEMS pressure sensing device MEMS pressure sensing device

2008-05-20

2008-05-20

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S724000, C073S754000

Reexamination Certificate

active

11501318

ABSTRACT:
A pressure sensing system formed in a monolithic semiconductor substrate. The pressure sensing system comprises a pressure sensing device formed on the monolithic semiconductor substrate. The pressure sensing device is adapted to be disposed in an environment for developing an electrical pressure signal corresponding to the pressure in the environment. The system includes driver circuitry formed in the monolithic semiconductor substrate. The driver circuitry is responsive to input electrical signal for generating an output pressure signal. A conductive interconnect structure formed in the monolithic semiconductor substrate to electrically connects the pressure sensing device to the driver circuitry such that electrical pressure signals developed by the pressure sensing device are provided as input electrical signals to the driver circuitry.

REFERENCES:
patent: 4881410 (1989-11-01), Wise et al.
patent: 4996627 (1991-02-01), Zias et al.
patent: 5663508 (1997-09-01), Sparks
patent: 5963788 (1999-10-01), Barron et al.
patent: 6445053 (2002-09-01), Cho
patent: 6472243 (2002-10-01), Gogoi et al.
patent: 6968743 (2005-11-01), Rich et al.
patent: 2004/0016995 (2004-01-01), Kuo et al.
patent: 2005/0208696 (2005-09-01), Villa et al.

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