Membrane for capacitive vacuum measuring cell

Details Membrane for capacitive vacuum measuring cell Membrane for capacitive vacuum measuring cell

2006-09-19

2006-09-19

Patel, Harshad (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S715000, C073S718000, C361S283400

Reexamination Certificate

active

07107855

ABSTRACT:
A ceramic membrane for a capacitive vacuum measuring cell includes a thin ceramic membrane with a thickness of <250 μm, in particular less than 120 μm. The membrane is produced from a ribbon-shaped green body of Al2O3, and is given high planarity by smoothing the membrane after sintering. The green body is sintered at a sintering temperature that is higher than the smoothing temperature applied following sintering.

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