MEMS pressure sensor and housing therefor

Details MEMS pressure sensor and housing therefor MEMS pressure sensor and housing therefor

2009-02-09

2011-10-11

Caputo, Lisa (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S715000

Reexamination Certificate

active

08033177

ABSTRACT:
A pressure sensing system positions a microelectromechanical (MEMS) diaphragm of a MEMS pressure sensor die in a housing to indirectly sample pressure state of a fluid being measured. A second housing diaphragm is used to make direct contact with the fluid being measured. Pressure state of the fluid being measured is transferred from the housing diaphragm through an electrically insulating intermediary fluid to the MEMS diaphragm thereby allowing the MEMS pressure sensor die to indirectly sample pressure state of the fluid being measured. Electrically conductive support members and electrically conductive solid vias are used to electrically couple circuitry of the MEMS pressure sensor die to external wires outside the housing.

REFERENCES:
patent: 6869818 (2005-03-01), Harris et al.
patent: 7004034 (2006-02-01), Chen
patent: 7011288 (2006-03-01), Slicker et al.
patent: 7125739 (2006-10-01), Harris et al.
patent: 7162926 (2007-01-01), Guziak et al.

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