Media compatible pressure transducer

Details Media compatible pressure transducer Media compatible pressure transducer

1979-08-13

1980-09-16

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73727, 338 4, G01L 906

Patent

active

042222770

ABSTRACT:
There is disclosed an absolute pressure transducer which is adaptable for use in various deleterious mediums. A single wafer contains a gage sensor configuration on one portion and an absolute sensor configuration on another adjacent portion. An active diaphragm area is defined for each sensor configuration by forming a depression beneath the sensor locations. A base member is bonded or secured to the wafer at the side containing the depressions. An aperture is directed through the base member to communicate with the depression associated with the gage sensor configuration and is employed as an external pressure port. The top surface of the wafer which contains the sensors is exposed to a relatively clean source of pressure to thereby enable the absolute sensor section to monitor this pressure, while the gage sensor section responds to both pressures.

REFERENCES:
patent: 2336500 (1943-12-01), Osterberg
patent: 4021766 (1977-05-01), Aine
patent: 4023562 (1977-05-01), Hynecek et al.
patent: 4131088 (1978-12-01), Reddy

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