Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1995-04-03
1999-03-30
Dombroske, George
Measuring and testing
Fluid pressure gauge
Diaphragm
73706, 2940708, G01L 904
Patent
active
058892117
ABSTRACT:
A media compatible microsensor structure (11) for sensing an environmental condition in a harsh media includes an inorganic protective film (17) covering portions of the structure that will be exposed to the harsh media. In one embodiment, the microsensor structure (11) includes a microsensor package (12), a microsensor device (16) bonded to the microsensor package (12), a leadframe (13), a connective wire (14) connecting the microsensor device (16) to the leadframe (13), and an inorganic protective film (17) formed on all or portion of the exposed surfaces of the structure.
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Pending U.S. Patent Application Serial No.: 08/367,603; Entitled: "Flow Sensor Device and Method"; Inventor: Vijay Sarihan; Assignee: Motorola, Inc.; File Date: 01/03/95.
Maudie Theresa A.
Monk David J.
Savage Timothy S.
Amrozowicz Paul D.
Dombroske George
Jackson Kevin B.
Motorola Inc.
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