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Vacuum processing apparatus and semiconductor manufacturing...

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Vacuum processing apparatus and semiconductor manufacturing...

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Vacuum processing apparatus and semiconductor manufacturing...

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Reexamination Certificate

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Vacuum processing apparatus and semiconductor manufacturing...

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Reexamination Certificate

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Vacuum processing apparatus and semiconductor manufacturing...

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Reexamination Certificate

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Vacuum processing apparatus and semiconductor manufacturing...

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Vacuum processing apparatus and semiconductor manufacturing...

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Reexamination Certificate

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Vacuum processing apparatus and semiconductor manufacturing...

Material or article handling – Process – Of moving material between zones having different pressures...
Reexamination Certificate

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Vacuum processing apparatus and vacuum processing method

Material or article handling – Process – Of charging load-holding or -supporting element from source...
Reexamination Certificate

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Vacuum processing apparatus with low particle generating wafer c

Material or article handling – Apparatus for charging a load holding or supporting element... – Load holding or supporting element including gripping means
Patent

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Vacuum processing system

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Vacuum processing system

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Vacuum processing system being able to carry process object...

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Vacuum processing system being able to carry process object...

Material or article handling – Apparatus for moving material between zones having different...
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Vacuum processing unit and apparatus

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Vacuum receiver with positive dump valve control

Material or article handling – Static receptacle and means for charging or discharging – or...
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Vacuum sealed manipulator

Material or article handling – Article manipulator moves analogous with human hand – finger,... – Having sealing or radiation shielding means
Patent

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Vacuum stick and lath placer

Material or article handling – Apparatus for moving intersupporting articles into – within,... – Stack forming apparatus
Patent

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Vacuum system

Material or article handling – Device for emptying portable receptacle – With container opening means
Patent

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Vacuum track and pallets

Material or article handling – Load carried along a horizontal linear path – Having gripper means
Patent

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