Vacuum processing apparatus and vacuum processing method

Details Vacuum processing apparatus and vacuum processing method Vacuum processing apparatus and vacuum processing method

2011-01-04

2011-01-04

Fox, Charles A (Department: 3652)

Material or article handling

Process

Of charging load-holding or -supporting element from source...

Reexamination Certificate

active

07862289

ABSTRACT:
A vacuum processing apparatus and method in which the apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.

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