Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Reexamination Certificate
2005-11-08
2005-11-08
Brahan, Thomas J. (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
C414S217000, C414S939000
Reexamination Certificate
active
06962472
ABSTRACT:
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
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IBM Technical Disclosure Bulletin, vol. 27, No. 12, May 31, 1985, pp. 6997-6998 XP002017023 “Generic Work Station”.
Kawasaki Yoshinao
Soraoka Minoru
Yoshioka Ken
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