Fast swap dual substrate transport for load lock

Details Fast swap dual substrate transport for load lock Fast swap dual substrate transport for load lock

2008-05-20

2008-05-20

Fox, Charles A (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

Reexamination Certificate

active

11104397

ABSTRACT:
A load lock is provided for a semiconductor substrate processing system having a transport robot mounted therein. The load lock transport supplies substrates directly to a processing chamber without the need for a central transport robot. The load lock transport is a dual element robot designed for minimum clearance and space and operates within a matching load lock chamber of minimum volume.

REFERENCES:
patent: 4816098 (1989-03-01), Davis et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 5482607 (1996-01-01), Hashimoto et al.
patent: 5664925 (1997-09-01), Muka et al.
patent: 5897710 (1999-04-01), Sato et al.
patent: 5989346 (1999-11-01), Hiroki
patent: 5997235 (1999-12-01), Hofmeister
patent: 6002971 (1999-12-01), Lucas
patent: 6045315 (2000-04-01), Azumano et al.
patent: 6053980 (2000-04-01), Suda et al.
patent: 6059507 (2000-05-01), Adams
patent: 6073366 (2000-06-01), Aswad
patent: 6126381 (2000-10-01), Bacchi et al.
patent: 6142722 (2000-11-01), Genov et al.
patent: 6234107 (2001-05-01), Tanaka et al.
patent: 6435809 (2002-08-01), Goodwin et al.
patent: 6609869 (2003-08-01), Aggarwal et al.
patent: 6969227 (2005-11-01), Kinnard et al.
Japanese Patent Application Publication No. 3,549,674(P3549674), publication date: Aug. 8, 2004; Tokyo Oka Kogyo Co., Ltd.

Affiliated with

Also associated with

Rating

Fast swap dual substrate transport for load lock does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fast swap dual substrate transport for load lock, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fast swap dual substrate transport for load lock will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3953635