Fast swap dual substrate transport for load lock

Details Fast swap dual substrate transport for load lock Fast swap dual substrate transport for load lock

2005-07-19

2005-07-19

Lillis, Eileen D. (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S805000, C414S744500

Reexamination Certificate

active

06918731

ABSTRACT:
A load lock is provided for a semiconductor substrate processing system having a transport robot mounted therein. The load lock transport supplies substrates directly to a processing chamber without the need for a central transport robot. The load lock transport is a dual element robot designed for minimum clearance and space and operates within a matching load lock chamber of minimum volume.

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Japanese Patent Application Publication No. 3,549,674(P3549674), publication date: Aug. 8, 2004; Tokyo Oka Kogyo Co., Ltd.

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