Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1996-12-11
1999-09-28
Werner, Frank E.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
118719, 414331, 414940, 414939, 414222, 414236, B65G 112
Patent
active
059576480
ABSTRACT:
An improved apparatus and method is provided for handling, moving and storing semiconductor wafer carriers. The apparatus comprises two physically separate load ports, each coupled to a vertical transfer mechanism. Coupled between the two vertical transfer mechanisms is a horizontal transfer mechanism which extends above the footprint of the fabrication tool to which wafers are to be supplied. In a preferred embodiment the horizontal transfer mechanism comprises a bi-level conveyor comprised of a series of dual compartment segments. The dual compartment segments are coupled such that they may shift between a neutral and a positive position while maintaining a continuous movement channel between the two vertical transfer mechanisms. In this manner a wafer carrier may be placed within a first compartment of a neutrally positioned segment for movement; to store the wafer carrier the segment is shifted to the positive position. Thus a continuous movement channel comprised of the first or second compartments of a plurality of segments is maintained. The horizontal movement channel of a number of apparati may be interconnected to provide a local interconnection of fabrication tools.
REFERENCES:
patent: 3610445 (1971-10-01), Kitchen et al.
patent: 4047624 (1977-09-01), Dorenbos
patent: 4615430 (1986-10-01), Satoh
patent: 4781511 (1988-11-01), Harada et al.
patent: 4793262 (1988-12-01), Horn
patent: 4826360 (1989-05-01), Iwasawa et al.
patent: 4851018 (1989-07-01), Lazzari et al.
patent: 4904153 (1990-02-01), Iwasawa et al.
patent: 4986715 (1991-01-01), Asakawa
patent: 5048164 (1991-09-01), Harima
patent: 5363867 (1994-11-01), Kawano et al.
patent: 5391035 (1995-02-01), Krueger
patent: 5399531 (1995-03-01), Wu
patent: 5425611 (1995-06-01), Hughes et al.
patent: 5462397 (1995-10-01), Iwabuchi
patent: 5464313 (1995-11-01), Ohsawa
patent: 5527390 (1996-06-01), Ono et al.
patent: 5562383 (1996-10-01), Iwai et al.
patent: 5570990 (1996-11-01), Bonora et al.
patent: 5586585 (1996-12-01), Bonora et al.
patent: 5628604 (1997-05-01), Murata et al.
patent: 5655869 (1997-08-01), Scheler et al.
patent: 5788448 (1998-08-01), Wakamori et al.
"Infab Universal Load Ports" 1995 Infab.
"Erect-A-Line".RTM. Middlesex Industries.
Applied Materials Inc.
Werner Frank E.
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