4. Heating
  5. Work feeding, agitating, discharging or conveying...
  6. Removable furnace bottom section or kiln cart
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Vertical thermal processor for semiconductor wafers

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent

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Vertical type heat processing apparatus and vertical type...

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Reexamination Certificate

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Vertical type heat-treating apparatus

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent

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Vertical type heat-treatment apparatus

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent

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