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Wafer boat

Heating – Accessory means for holding – shielding or supporting work...
Patent

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Wafer boat

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer boat for a vertical furnace

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Patent

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Wafer boat with arcuate wafer support arms

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer clamp for a heater assembly

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer hanger useful for thermally treating semiconductor wafers

Heating – Accessory means for holding – shielding or supporting work...
Patent

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Wafer holder

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer softlanding system and cooperative door assembly

Heating – Accessory means for holding – shielding or supporting work...
Patent

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Wafer support tool for heat treatment and heat treatment...

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer support tool for heat treatment and heat treatment...

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer tray construction

Heating – Accessory means for holding – shielding or supporting work...
Patent

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Ware support apparatus

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Patent

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Workpiece support trays for furnances

Heating – Accessory means for holding – shielding or supporting work... – Openwork tray – basket – or grid structure for heat treating...
Reexamination Certificate

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