4. Heat exchange
  5. With timer, programmer, time delay, or condition responsive...
  6. Control of amount of conductive gas in confined space...
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Cooling device for vacuum treatment device

Heat exchange – With timer – programmer – time delay – or condition responsive... – Control of amount of conductive gas in confined space...
Reexamination Certificate

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Method for controlling heat exchange in a nuclear reactor

Heat exchange – With timer – programmer – time delay – or condition responsive... – Control of amount of conductive gas in confined space...
Reexamination Certificate

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Method of regulating substrate temperature in a low pressure env

Heat exchange – With timer – programmer – time delay – or condition responsive... – Control of amount of conductive gas in confined space...
Patent

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Quasi-infinite heat source/sink

Heat exchange – With timer – programmer – time delay – or condition responsive... – Control of amount of conductive gas in confined space...
Patent

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Temperature controlled chuck for vacuum processing

Heat exchange – With timer – programmer – time delay – or condition responsive... – Control of amount of conductive gas in confined space...
Patent

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Thermally conductive chuck for vacuum processor

Heat exchange – With timer – programmer – time delay – or condition responsive... – Control of amount of conductive gas in confined space...
Reexamination Certificate

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Vacuum processing method and apparatus

Heat exchange – With timer – programmer – time delay – or condition responsive... – Control of amount of conductive gas in confined space...
Patent

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