Heat exchange – With timer – programmer – time delay – or condition responsive... – Control of amount of conductive gas in confined space...
Patent
1995-06-02
1997-10-07
Ford, John K.
Heat exchange
With timer, programmer, time delay, or condition responsive...
Control of amount of conductive gas in confined space...
165 804, 165 805, 156345, 118725, 118724, F28F 2700
Patent
active
056737505
ABSTRACT:
This invention relates to a vacuum processing method and apparatus. When a sample is plasma processed under a reduced pressure, a sample bed is cooled by a cooling medium kept at a predetermined temperature lower than an etching temperature, the sample is held on the sample bed, a heat transfer gas is supplied between the back of the sample and the sample installation surface of the sample bed, and the pressure of the heat transfer gas is controlled so as to bring the sample to a predetermined processing temperature. Before the step of holding the sample on the sample bed and supplying the heat transfer gas, heat transfer gas remaining upstream and downstream of the flow rate regulator in the supply line for the heat transfer gas is vacuum exhausted. This is accomplished using a bypass line connected upstream and downstream of the flow rate regulator and an arrangement of appropriate valves.
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Itou Atsushi
Kato Shigekazu
Nishihata Kouji
Tamura Naoyuki
Tsubone Tsunehiko
Ford John K.
Hitachi , Ltd.
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