Cooling device for vacuum treatment device

Heat exchange – With timer – programmer – time delay – or condition responsive... – Control of amount of conductive gas in confined space...

Reexamination Certificate

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C165S276000, C165S080100, C165S080400, C165S096000, C118S715000, C118S725000, C156S345270, C156S345520, C156S345530, C204S298070, C204S298330

Reexamination Certificate

active

07913752

ABSTRACT:
A cooling system for a vacuum processing apparatus is provided with an internal heat conduction path for transfer of heat entering the subject body through the vacuum processing apparatus, a heat radiation path for radiation of the heat to an outside of the vacuum processing apparatus and a heat conduction path for regulation of quantity of heat transfer between the internal heat conduction path and the heat radiation path. Preferably, a heat pipe is applied to the internal heat conduction path.

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