4. Etching a substrate: processes
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Dual-valent rare earth additives to polishing slurries

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
Patent

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Durable mask and method of fabrication

Etching a substrate: processes – Forming or treating mask used for its nonetching function
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Durable plasma treatment apparatus and method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Dynamic hard magnet thickness adjustment for reduced...

Etching a substrate: processes – Nongaseous phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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