Methodology for manufacturing hinged diaphragms for semiconducto
Micro displacement force transducer
Micro electro-mechanical variable capacitor
Micro-electro-mechanical system (MEMS) capacitors,...
Micro-electro-mechanical system (MEMS) variable capacitors...
Micro-electro-mechanical varactor and a method of making and...
Micro-electromechanical variable capacitor
Micro-electromechanical voltage tunable capacitor and and...
Microcomponent including a capacitive component
Microelectronic tunable capacitor and method for fabrication
Micromachined capacitor structure and method for making
Micromachined parallel-plate variable capacitor with plate...
Micromachined variable capacitor
Micromechanical component and process for its fabrication
Miniature trimmer with flexible plastic base
Miniature variable capacitor
Miniature variable capacitor provided with a driving mechanism
Moisture sensitive element and method of manufacturing the same
Moisture sensor
Moisture-sensitive element