Micro-electro-mechanical system (MEMS) capacitors,...

Details Micro-electro-mechanical system (MEMS) capacitors,... Micro-electro-mechanical system (MEMS) capacitors,...

2008-06-10

2008-06-10

Ha, Nguyen T. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S272000, C361S278000, C361S283300, C361S287000, C361S290000, C361S292000

Reexamination Certificate

active

07385800

ABSTRACT:
According to one aspect, the subject matter described herein includes a MEMS fixed capacitor and a method for fabricating the MEMS fixed capacitor. The MEMS fixed capacitor can include a first stationary, capacitive plate on a substrate. Further, the MEMS fixed capacitor can include a non-conductive, stationary beam suspended above the substrate. The MEMS fixed capacitor can also include a second stationary, capacitive plate spaced a predetermined distance from the first stationary, capacitive plate for producing a predetermined capacitance between the capacitive plates.

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