Micromachined capacitor structure and method for making

Details Micromachined capacitor structure and method for making Micromachined capacitor structure and method for making

1992-05-14

1993-01-19

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73517R, H01G 700, G01P 1508

Patent

active

051811561

ABSTRACT:
A micromachined capacitor structure having integral travel stops (19, 22, 22') within an active region of the capacitor is provided. The capacitor structure is formed on a substrate (11) and includes a moving capacitor plate (15) supported by one or more flexing arms (17) mechanically anchored to the substrate (11). The moving capacitor plate (15) has an active region (15) substantially parallel to the substrate (11) and separated from the substrate (11) by a first spacing. A corrugation (19) is formed in the moving capacitor plate (15) over the substrate (11) and separated from the substrate (11) by a second spacing, wherein the second spacing is smaller than the first spacing.

REFERENCES:
patent: 4882933 (1989-11-01), Petersen et al.

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