Micro-electromechanical variable capacitor

Details Micro-electromechanical variable capacitor Micro-electromechanical variable capacitor

2003-06-09

2008-10-21

Ha, Nguyen T (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S272000, C361S278000, C361S283300, C361S290000, C361S292000

Reexamination Certificate

active

07440254

ABSTRACT:
A micro-electromechanical variable capacitor with first and second capacitor plates spaced apart to define a gap therebetween. The first plate has two control electrodes and an active electrode. The second plate is movable relative to first plate when a voltage is applied to produce a potential difference across the control electrode and the second capacitor plate. This has the effect of varying the capacitance of the capacitor. The facing surface of at least one of the plates is formed in such a way that it has a roughened surface. The degree of roughness is sufficient to prevent the facing surfaces adhering together through stiction.

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Jun Zou, et al., Development of a Wide Tuning Range MEMS Tunable Capacitor for Wireless Communication Systems, Department of Electrical & Computer Engineering, University of Illinois, date unknown.

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