Micro-electromechanical voltage tunable capacitor and and...

Details Micro-electromechanical voltage tunable capacitor and and... Micro-electromechanical voltage tunable capacitor and and...

2011-04-26

2011-04-26

Menz, Laura M (Department: 2813)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C257S415000, C334S014000

Reexamination Certificate

active

07933112

ABSTRACT:
Disclosed are one-port and two-port voltage-tunable micro-electromechanical capacitors, switches, and filter devices. High aspect-ratio metal micromachining is used to implement very high quality factor (Q) tunable and fixed capacitors, fixed inductors, and low insertion loss tunable and fixed bandpass LC filters. The tunable capacitors can move in the plane of the substrate by the application of DC voltages and achieve greater than 100% of tuning. A combination of low-loss substrate and highest conductivity metal is used to achieve record high Q and low insertion loss at radio frequencies. The disclosed tunable capacitor structure can also be used as a micromechanical switch.

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