Integrated electrostatically-actuated micromachined all-metal mi

Integrated microsprings for speed switches

Integrated microsprings for speed switches

Liquid metal switch employing an electrically isolated...

Liquid metal switch employing an electrically isolated...

Liquid switch

Low actuation voltage microelectromechanical device and method o

Low inductance cantilever switch

Low-voltage long life electrostatic microelectromechanical syste

Mechanical switch

Membrane for micro-electro-mechanical switch, and methods of...

MEMS device with integral packaging

MEMS micro-relay with coupled electrostatic and...

MEMs switching system

Mesoscale MEMS switch apparatus and method

Method and apparatus for an improved single pole double throw mi

Micro electro-mechanical system switch and method of...

Micro electro-mechanical system switch and method of...

Micro electro-mechanical system with one or more moving...

Micro power switch